Share Email Print
cover

Proceedings Paper

High-precision centering and undeformed cementing technique for optical lens
Author(s): Fan Wu; Li Yang; Shibin Wu; Qiang Cheng
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The principle, method and technical characteristics of high- precision centering and undeformed cementing technique for optical lens are presented in the paper. The method has been used in achromatic lens of 5X and 10X projection photolithographic objective in IOECAS'. The decentration error is within 1" and surface accuracy maintains in original ± λ/20 approximately ± λ/40. The method has the advantages of high precision, fast speed and undeformation.

Paper Details

Date Published: 6 October 2000
PDF: 5 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402787
Show Author Affiliations
Fan Wu, Institute of Optics and Electronics (China)
Li Yang, Institute of Optics and Electronics (China)
Shibin Wu, Institute of Optics and Electronics (China)
Qiang Cheng, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

© SPIE. Terms of Use
Back to Top