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Proceedings Paper

Fabrication of binary optical elements by thin film deposition
Author(s): Wei Huang; Chongxi Zhou; Jin Zhu; Yundong Zhang
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Paper Abstract

In this paper, the process of fabrication of binary optical elements by thin film deposition has been introduced. An eight-level phase microlens array has been fabricated with 20 X 20 rectangularly shaped microlenses, focal length of 100 mm and lens size of 0.8 mm for the wavelength of 0.6328 μm. Our measurements show that all the step heights are nearly identical and the controlled precision of step heights was better than 1 nm.

Paper Details

Date Published: 6 October 2000
PDF: 3 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402784
Show Author Affiliations
Wei Huang, Sichuan Univ. (China) and Institute of Optics and Electronics (China)
Chongxi Zhou, Institute of Optics and Electronics (China)
Jin Zhu, Institute of Optics and Electronics (China)
Yundong Zhang, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000

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