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Proceedings Paper

Spatial frequency compensation in manufacturing of micro-optic elements
Author(s): Hongjun Zeng; Bo Chen; Lurong Guo; Chunlei Du; Huimin Tao
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Paper Abstract

The high frequency compensation of the array micro-optical elements (MOE) is presented in this paper. The authors analyzed the spatial frequency loss of the profiles of the elements by Fourier series at first, and give the compensation scheme in the mask moving (M2) project exposing system. The blazed grating is discussed as an example with the smart mask design and element fabrication. As a result, the transitions of the 5 micrometer blazed gratings were cut down from 1.58 μm to 1.29 μm.

Paper Details

Date Published: 6 October 2000
PDF: 6 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402776
Show Author Affiliations
Hongjun Zeng, Institute of Optics and Electronics (China)
Bo Chen, Institute of Optics and Electronics (China)
Lurong Guo, Institute of Optics and Electronics (China)
Chunlei Du, Institute of Optics and Electronics (China)
Huimin Tao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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