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Proceedings Paper

Dual laser probe for testing surface roughness and microdisplacement
Author(s): Shihua Wang; Chongjiu Jin; Tao Zhang; Zhaofei Zhou
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Paper Abstract

As a practical monitoring tool for measurements of surface roughness and micro-displacement, an optical implementation of the method based on light scattering for measuring surface roughness and optical triangulation for measuring micro- displacement is proposed. The technique enables evaluation of the surface roughness and micro-displacement of specimen by using only one device. The measuring principle and basic analysis applied in the design are described in detail, after which the validity of the principle is demonstrated by the results of experimental evaluations. Experimental results show that micro-displacement measuring linear range within ± 300 μm can be obtained for measurements of specimen of surface roughness with Ra from 0.005μm to 0.1 μm.

Paper Details

Date Published: 6 October 2000
PDF: 7 pages
Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402754
Show Author Affiliations
Shihua Wang, Sichuan Univ. (Singapore)
Chongjiu Jin, Sichuan Univ. (China)
Tao Zhang, Sichuan Univ. (China)
Zhaofei Zhou, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 4231:
Advanced Optical Manufacturing and Testing Technology 2000
Li Yang; Harvey M. Pollicove; Qiming Xin; James C. Wyant, Editor(s)

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