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Proceedings Paper

Integrated multimode interference couplers in silicon-on insulator
Author(s): Hongzhen Wei; Jinzhong Yu; Xiaofeng Zhang; Zhongli Liu; Hongzhi Ma; Guohua Li; Wei Shi; Changshui Fang
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Paper Abstract

Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0 micrometer) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 X 4 and 2 X 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8 dB. The devices show uniform power distribution.

Paper Details

Date Published: 9 October 2000
PDF: 4 pages
Proc. SPIE 4225, Optical Interconnects for Telecommunication and Data Communications, (9 October 2000); doi: 10.1117/12.402688
Show Author Affiliations
Hongzhen Wei, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)
Xiaofeng Zhang, Institute of Semiconductors (China)
Zhongli Liu, Institute of Semiconductors (China)
Hongzhi Ma, Institute of Semiconductors (China)
Guohua Li, Institute of Semiconductors (China)
Wei Shi, Shandong Univ. (China)
Changshui Fang, Shandong Univ. (China)


Published in SPIE Proceedings Vol. 4225:
Optical Interconnects for Telecommunication and Data Communications
Xiaomin Ren; Suning Tang, Editor(s)

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