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Proceedings Paper

New advance in laser interferometry
Author(s): Chunyong Yin; Zhixia Chao; Sai Gao; Hong Jiang; Jin Sun
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Paper Abstract

Modern technology development requires interferometry of uttermost quality, which is characterized as high measurement speed, large measurement range, low drift and super-high resolution, good accuracy and efficiency. Firstly this paper introduces a frequency stabilized laser with 5MHz beat frequency which is based on the bi-reflection principle, and a high measurement speed dual-frequency laser interferometer whose allowable displacement velocity is over 1m/s using this kind of laser. Secondly it introduces a transverse Zeeman frequency stabilized laser with 300KHz beat frequency and its applications in nanometer measurement, collimation, coaxiality measurement, roll angle measurement and biomembrane measurement. Thirdly a tunable 633nm external-cavity diode laser (ECL) interferometer is presented.

Paper Details

Date Published: 9 October 2000
PDF: 5 pages
Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); doi: 10.1117/12.402620
Show Author Affiliations
Chunyong Yin, Tsinghua Univ. (China)
Zhixia Chao, Tsinghua Univ. (China)
Sai Gao, Tsinghua Univ. (Germany)
Hong Jiang, Tsinghua Univ. (China)
Jin Sun, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4221:
Optical Measurement and Nondestructive Testing: Techniques and Applications
FeiJun Song; Frank Chen; Michael Y.Y. Hung; H.M. Shang, Editor(s)

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