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Proceedings Paper

Nondestructive survey of a buried surface and interface structure by x-ray scattering
Author(s): Wenjun Ma; J. E. Macdonald; Gang Jia
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Paper Abstract

X-ray scattering as a nondestructive probe was used in studying surface and interface structure. Two monolayers InAs was found to be existence between InGaAs and InP by simulating scattering data. The interfacial effects on peak-separation of substrate to epilayer and on layer thickness were simulated.

Paper Details

Date Published: 9 October 2000
PDF: 4 pages
Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); doi: 10.1117/12.402614
Show Author Affiliations
Wenjun Ma, Jilin Univ. (China)
J. E. Macdonald, Univ. of Wales Cardiff (United Kingdom)
Gang Jia, Jilin Univ. (China)


Published in SPIE Proceedings Vol. 4221:
Optical Measurement and Nondestructive Testing: Techniques and Applications
FeiJun Song; Frank Chen; Michael Y.Y. Hung; H.M. Shang, Editor(s)

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