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Proceedings Paper

Nondestructive testing method of crystal surface defectiveness
Author(s): Ekaterina V. Zhukova
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Paper Abstract

Article is devoted to a not destroying method of analysis of crystals surface quality for a vacuum ultra-violet range. The registration of absorption spectra of color centers located in a thin near-surface layer of a crystal with the help of a method of attenuated total reflection spectroscopy allows to visualize defective structure layer formed after machining.

Paper Details

Date Published: 9 October 2000
PDF: 6 pages
Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); doi: 10.1117/12.402588
Show Author Affiliations
Ekaterina V. Zhukova, Institute of Fine Mechanics and Optics (Russia)

Published in SPIE Proceedings Vol. 4221:
Optical Measurement and Nondestructive Testing: Techniques and Applications
FeiJun Song; Frank Chen; Michael Y.Y. Hung; H.M. Shang, Editor(s)

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