Share Email Print
cover

Proceedings Paper

Grating displacement sensor in which the grating line is subdivided directly by CCD instead of subdividing the moire fringes
Author(s): ShuRong He; Zongyang Xiao; Zhuang He
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Different from the traditional way of subdividing the moire fringe that needs complex subsequent circuits, we adopt a linear CCD array to subdivide the grating line directly. Because of the CCD's high sensitivity, consistency and the amount of pixels, the interval between two neighboring lines of the grating can be measured and the subdivision factor is up to thousands of times. Therefore, our device can attain high resolution with limited cost. The circuit is also much simpler than before since CCD driver itself completes the subdividing and digitizing functions. The practical device's precision is better than 0.1 micrometers and the linearity is better than 0.99.

Paper Details

Date Published: 9 October 2000
PDF: 4 pages
Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); doi: 10.1117/12.402570
Show Author Affiliations
ShuRong He, Tsinghua Univ. (China)
Zongyang Xiao, Tsinghua Univ. (China)
Zhuang He, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4221:
Optical Measurement and Nondestructive Testing: Techniques and Applications
FeiJun Song; Frank Chen; Michael Y.Y. Hung; H.M. Shang, Editor(s)

© SPIE. Terms of Use
Back to Top