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Proceedings Paper

Succinct design method of soft x-ray multilayer mirror
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Paper Abstract

In order to acquire high reflectance, how to select the thickness dH and dL of the high and low atomic numbers materials should be considered first of all in the design of soft x-ray multi-layer. This paper introduced a simple design method based on matrix method. In the design process of a multi-layer mirror using Mo/Si at (lambda) equals 13.1 nm and normal incidence, its reflectance reaches 67.0 percent when layers are 30. Compared with other method, although its reflectance is a bit lower, it is a simple and practical method.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401778
Show Author Affiliations
Li-Min Song, Dalian Univ. of Technology (China)
Jia-sheng Hu, Dalian Univ. of Technology (China)

Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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