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Proceedings Paper

Grating angular displacement transducer using a Fabry-Perot structure and its performance improvement
Author(s): Zhiquan Li; Xifu Qiang; Zhaoxia Wu; Chunling Fan
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Paper Abstract

The Fabry-Perot interferometer (FPI) has been traditionally used to examine either small spectral ranges or relatively simple spectra. Recently, however, the studies have shown that the FPI can be competitive with the Michelson interferometer over extended spectral ranges. A relatively new FPI is described based on two gratings. In order to measure angular micro-displacement, a novel grating angular displacement transducer using a multiplex Fabry-Perot interference technology has been developed in this paper.

Paper Details

Date Published: 5 October 2000
PDF: 5 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401775
Show Author Affiliations
Zhiquan Li, Harbin Institute of Technology (China)
Xifu Qiang, Harbin Institute of Technology (China)
Zhaoxia Wu, Yanshan Univ. (China)
Chunling Fan, Yanshan Univ. (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control

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