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Proceedings Paper

Novel pressure sensor with a Fabry-Perot interferometer
Author(s): Zhiquan Li; Lina Fan; Xifu Qiang
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Paper Abstract

A novel pressure sensor using a fiber Fabry-Perot interferometer (FFPI) has been developed in this paper. We use the internal F-P cavity pressure sensor in our research. Micromachined Fabry-Perot microcavity structures have been investigated for use as a pressure sensor. The single-mode fiber containing the interferometer is bonded at one end to the stainless-steel diaphragm and is also attached under longitudinal tension beyond the interferometer. An analysis relating the expected interferometer phase change to pressure is presented. And the dynamic response of FFPI sensor to pressure changes produced by an air pump is in good agreement with that measured with a conventional pressure sensor. The sensor is suitable for operation with other signal-processing and multiplexing schemes.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401773
Show Author Affiliations
Zhiquan Li, Harbin Institute of Technology (China)
Lina Fan, Yanshan Univ. (China)
Xifu Qiang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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