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Proceedings Paper

Photoelectric soft x-ray multilayer coating thickness control system
Author(s): Xuan Ming; Bin Chen; Zhi Liu
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Paper Abstract

This paper introduces a photoelectric soft x-ray multi-layer thickness control system. This paper highlights the operating principle of ion beam sputter coating system, the hardware and software scheme of coating thickness auto- control system.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401769
Show Author Affiliations
Xuan Ming, Changchun Institute of Optics and Fine Mechanics (China)
Bin Chen, Changchun Institute of Optics and Fine Mechanics (China)
Zhi Liu, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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