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Proceedings Paper

New type of micropump using SMA thin film actuator
Author(s): Tongyu Wang; Huilin Jiang
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Paper Abstract

In this paper, a new prototype model of a micropump using a SMA thin film actuator as the servo actuator is proposed. This micropump consist of two one-way valves that make use of the same SMA thin film actuator. The overall size of this micropump prototype is 12mm in diameter and 20mm in length. The characteristics of the micropump were measured, experimental results indicating that the micropump provides satisfactory responses.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401767
Show Author Affiliations
Tongyu Wang, Changchun Institute of Optics and Fine Mechanics (China)
Huilin Jiang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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