Share Email Print
cover

Proceedings Paper

Compensation of phase change upon reflection in white light interferometry
Author(s): Min-Cheol Park; Seung-Woo Kim
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this paper we present a compensation method of the phase change upon reflection with a particular aim of measuring step heights using white light interferometry.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401757
Show Author Affiliations
Min-Cheol Park, Korea Advanced Institute of Science and Technology (United States)
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

© SPIE. Terms of Use
Back to Top