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Proceedings Paper

CVD diamond microhinge for MOEMS applications
Author(s): Guifu Ding; Xiaolin Zhao; Xiang Yao; Tianhui Shen
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Paper Abstract

CVD diamond films is one of the most interesting materials under consideration for microelectromechanical system (MEMS), especially for optical MEMS, but diamond is difficult to be fabricated due to its hardness and chemical inertness, for this purpose, we have developed a patterning process based on O2RIE etching of CVD diamond films and formed a new type of surface micromachining process for microfabricating of diamond MOEMS microparts, combining with sacrificial releasing and electroplating through mask techniques, this surface micromachining process is able to fabricate fine lines and complicated microstructures, and a diamond micro hinge for free-space micro-optical bench has been fabricated by this process successfully.

Paper Details

Date Published: 5 October 2000
PDF: 4 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401753
Show Author Affiliations
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Xiang Yao, Shanghai Jiao Tong Univ. (China)
Tianhui Shen, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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