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Proceedings Paper

Design of fly's eye homogenizer for excimer laser micromachining
Author(s): Tiechuan Zuo; Tao Chen; Chengde Li
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Paper Abstract

In this paper, the design of a fly's eye homogenizer for excimer laser micro-machining is described. The homogenizer has high performance in averaging the strong intensity fluctuations of the incident excimer laser beam and low transmitting loss. The dimension of the output beam can be adjusted continuously.

Paper Details

Date Published: 5 October 2000
PDF: 5 pages
Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401749
Show Author Affiliations
Tiechuan Zuo, Beijing Polytechnic Univ. (China)
Tao Chen, Beijing Polytechnic Univ. (China)
Chengde Li, Beijing Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 4223:
Instruments for Optics and Optoelectronic Inspection and Control
Guang Hui Wei; Sheng Liu, Editor(s)

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