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Proceedings Paper

Performance of optically excited silicon microresonators with coating film
Author(s): Yue-Ming Liu; Junhua Liu; Changchun Zhu
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Paper Abstract

Based on the theoretical analysis relating to the Heat Conducting Theory, the Thermal Strain Theory and the Mechanical Vibration Theory, the performance of the silicon microresonator with coating film are studied. The new models of resonant frequency and amplitude are presented by taking the coating film effect into full account, and the comparison between the theoretical values and experimental values shows that the models are more accurate.

Paper Details

Date Published: 3 October 2000
PDF: 5 pages
Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); doi: 10.1117/12.401719
Show Author Affiliations
Yue-Ming Liu, Xi'an Jiaotong Univ. (China)
Junhua Liu, Xi'an Jiaotong Univ. (China)
Changchun Zhu, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 4220:
Advanced Photonic Sensors: Technology and Applications
Jinfa Tang; Chao-Nan Xu; Haizhang Li, Editor(s)

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