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Proceedings Paper

Rapid detection of surface defects by x-ray scanning
Author(s): Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov
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Paper Abstract

A new device for rapid non-contact characterization of roughness spatial distribution of flat surfaces is developed. Its operational principle is based on the strong dependence on roughness of the intensity of x-rays reflected from a superpolished surface. This effect may be used to obtain a two-dimensional map of the roughness spatial distribution for flat surfaces with a rms, roughness height of the order of one nanometre. The key components of this device are a precision mechanical one-dimensional scanning stage, a parabolic collimator with vacuum beam path, and a temperature stabilized cooled x-ray linear detector array.

Paper Details

Date Published: 26 September 2000
PDF: 9 pages
Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); doi: 10.1117/12.401657
Show Author Affiliations
Vladimir V. Protopopov, Institute of Physics and Technology (Russia)
Kamil A. Valiev, Institute of Physics and Technology (Russia)
Rafik M. Imamov, Shubnikov Institute of Crystallography (Russia)

Published in SPIE Proceedings Vol. 4100:
Scattering and Surface Roughness III
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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