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Proceedings Paper

Facility for the curvature-based measurement of the nanotopography of complex surfaces
Author(s): Peter Thomsen-Schmidt; Michael Schulz; Ingolf Weingaertner
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Paper Abstract

An apparatus for measuring the topographies of complex surfaces with high accuracy by curvature scanning has been setup. For this purpose, a new type of curvature sensor that processes information from a relatively large area of the surface under test is moved along the surface. The principles advantages and a technical realization of this method referred to as large-area curvature scanning will be presented.

Paper Details

Date Published: 29 September 2000
PDF: 8 pages
Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); doi: 10.1117/12.401615
Show Author Affiliations
Peter Thomsen-Schmidt, Physikalisch-Technische Bundesanstalt (Germany)
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 4098:
Optical Devices and Diagnostics in Materials Science
David L. Andrews; David L. Andrews; Toshimitsu Asakura; Suganda Jutamulia; Wiley P. Kirk; Max G. Lagally; Ravindra B. Lal; James D. Trolinger, Editor(s)

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