Share Email Print
cover

Proceedings Paper

Reliable curvature sensor for measuring the topography of complex surfaces
Author(s): Michael Schulz; Peter Thomsen-Schmidt; Ingolf Weingaertner
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The problem of measuring steep aspheres with high accuracy has not yet been generally solved. In this presentation, a particular sensor type is presented which can be used to measure the form of optically smooth surfaces with no restrictions as regards lateral extent or complexity. It is a curvature sensor which can be guided along the surface. Curvature is an intrinsic property of the artifacts, which is independent of its position and angular orientation.

Paper Details

Date Published: 29 September 2000
PDF: 10 pages
Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); doi: 10.1117/12.401614
Show Author Affiliations
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Peter Thomsen-Schmidt, Physikalisch-Technische Bundesanstalt (Germany)
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 4098:
Optical Devices and Diagnostics in Materials Science
David L. Andrews; David L. Andrews; Toshimitsu Asakura; Suganda Jutamulia; Wiley P. Kirk; Max G. Lagally; Ravindra B. Lal; James D. Trolinger, Editor(s)

© SPIE. Terms of Use
Back to Top