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Proceedings Paper

Recording of 0.1-um minimum mark size in a new phase-change media
Author(s): Hiroshi Miura; Yoshitaka Hayashi; Shunsuke Fujita; Koji Ujiie; Kiyoshi Yokomori
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Paper Abstract

The shapes of phase-change marks on surface recording discs with a Substrate/Ag/lower ZnS-SiO2/AgInSbTe/upper ZnS- SiO2 layered structure were investigated by scanning electron microscopy (SEM). When the upper ZnS-SiO2 layer was removed by a wet chemical process, the marks were clearly observed as dark contrast in the secondary-electron image mode. The SEM observation showed that the mark size could be reduced to around 0.1 micrometers in the tangential direction. The mark shapes were crescents, and fluctuation with scaling down was hardly visible. Uniform 0.1 micrometers marks made on surface recording discs which use AgInSbTe will allow an increase in disc capacity.

Paper Details

Date Published: 18 September 2000
PDF: 6 pages
Proc. SPIE 4090, Optical Data Storage 2000, (18 September 2000); doi: 10.1117/12.399336
Show Author Affiliations
Hiroshi Miura, Ricoh Co., Ltd. (Japan)
Yoshitaka Hayashi, Ricoh Co., Ltd. (Japan)
Shunsuke Fujita, Ricoh Co., Ltd. (Japan)
Koji Ujiie, Ricoh Co., Ltd. (Japan)
Kiyoshi Yokomori, Ricoh Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4090:
Optical Data Storage 2000
Douglas G. Stinson; Ryuichi Katayama, Editor(s)

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