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Proceedings Paper

X-ray scanner: a new device for rapid mapping of nanometer-scale roughness
Author(s): Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov
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Paper Abstract

A new device for rapid non-contact characterization of roughness spatial distribution of flat surfaces is developed. Its operational principle is based on the strong dependence on roughness of the intensity of x-rays reflected from a superpolished surface. This effect may be used to obtain a two-dimensional map of the roughness spatial distribution for flat surface with a rms. roughness height of the order of one nanometre. The key components of this device are a precision mechanical one- dimensional scanning stage, a parabolic collimator with vacuum beam path, and a temperature stabilized cooled x-ray linear detector array.

Paper Details

Date Published: 31 August 2000
PDF: 8 pages
Proc. SPIE 4076, Optical Diagnostics for Industrial Applications, (31 August 2000); doi: 10.1117/12.397955
Show Author Affiliations
Vladimir V. Protopopov, Institute of Physics and Technology (Russia)
Kamil A. Valiev, Institute of Physics and Technology (Russia)
Rafik M. Imamov, Shubnikov Institute of Crystallography (Russia)


Published in SPIE Proceedings Vol. 4076:
Optical Diagnostics for Industrial Applications

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