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Proceedings Paper

Experimental and numerical models of a field heterodyne interferometer: discussion on optical influences in measurements
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Paper Abstract

Heterodyne interferometry is a powerful method to measure the shape of surfaces. However, to the present day there are only a few papers devoted to the analysis of the influence of an interferometric optical system on measurement results. The analysis can be related to its geometrical configuration and optical system aberrations. The problem is particularly important for full field heterodyne interferometry, where the aberrations are different for different field points. The measurement method idea of the registration of travelling fringes with a fast CCD camera and theoretical considerations supported by computer calculations are presented. The harmonic approach to optical imaging is the base to analyze the influence of geometrical and aberrational parameters on the measurement results for a chosen object. The complete optical system is proposed and the measurement results obtained in the laboratory are discussed.

Paper Details

Date Published: 31 August 2000
PDF: 9 pages
Proc. SPIE 4076, Optical Diagnostics for Industrial Applications, (31 August 2000); doi: 10.1117/12.397950
Show Author Affiliations
Tomasz S. Tkaczyk, Warsaw Univ. of Technology (United States)
Romulad Jozwicki, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 4076:
Optical Diagnostics for Industrial Applications
Neil A. Halliwell, Editor(s)

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