Share Email Print
cover

Proceedings Paper

Focused ion beam direct micromachining of DOEs
Author(s): Chantal Khan Malek; Frank T. Hartley; Jayant Neogi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We discuss here the capability of direct manufacture of various high- resolution diffractive optics, in particular regarding micromachining of DOEs in 3D. Preliminary demonstrations were made in 2-D using an automated FIB system operated at 30 KeV with a Gallium liquid metal ion source and equipped with a gas injection system (GIS). Gratings with a 20 nm line width and zone plates with 32 nm outer ring were milled in a reactive atmosphere (iodine) directly through 3.5 (mu) m and 800 nm of gold respectively. Plans for combining FIB and X-ray lithography to make diffractive optical elements (DOEs) for JPL are also mentioned.

Paper Details

Date Published: 1 September 2000
PDF: 6 pages
Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397932
Show Author Affiliations
Chantal Khan Malek, Univ. de Paris-Sud (France)
Frank T. Hartley, Jet Propulsion Lab. (United States)
Jayant Neogi, Norsam Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 4075:
Micro-Opto-Electro-Mechanical Systems
Richard R. A. Syms, Editor(s)

© SPIE. Terms of Use
Back to Top