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Proceedings Paper

Passive coupling of InGaAs/InP p-i-n detector and single-mode fiber using InP bulk micromachining
Author(s): Nandita DasGupta; Vangala Naveen Kumar; Kuna V.S.R. Kishore; Tejaswi Indukuri Kumar; Rajkumar Sankaralingam; Amitava DasGupta
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Paper Abstract

Realisation of low-cost and reliable packaging techniques to couple the optical fibre with the photodetector has become a critical area of research today. In the present work we have developed a simple technique to automatically align the fibre with the detector by micromachining the InP substrate (used for fabricating the p-i-n detector) and using the resulting V-groove for accurate positioning of the fibre. A masking material has been depositied on the back surface of the wafer and patterned by photolithography to open an window exactly aligned to the p-i-n detector realised on the top surface. InP has been etched anisotropically through this window. This has resulted in a V-groove through which the fibre can be inserted and held in position. Three different etch maskmaterials viz Ti, Cr, and SiN have been tried and their effects on the shape of the v-groove have been compared. Two different etch solutions have bene sued to etch InP. It has been found that while the choice of the etching solution determines the angle of the v-groove as well as the surface finish, the mask material dictates the amount of undercut. Ti as the mask material has been found to give the best results.

Paper Details

Date Published: 1 September 2000
PDF: 6 pages
Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397925
Show Author Affiliations
Nandita DasGupta, Indian Institute of Technology Madras (India)
Vangala Naveen Kumar, Indian Institute of Technology Madras (India)
Kuna V.S.R. Kishore, Indian Institute of Technology Madras (India)
Tejaswi Indukuri Kumar, Indian Institute of Technology Madras (India)
Rajkumar Sankaralingam, Indian Institute of Technology Madras (India)
Amitava DasGupta, Indian Institute of Technology Madras (India)

Published in SPIE Proceedings Vol. 4075:
Micro-Opto-Electro-Mechanical Systems
Richard R. A. Syms, Editor(s)

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