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Proceedings Paper

Optical pressure sensor for an aeronautical application using white light interferometry
Author(s): John Greenwood; George M. Dobre
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Paper Abstract

An optical pressure sensor for measuring hydraulic pressure in an aeronautical application is described. It is based on interferometry with low-coherence light coupled with single mode fibre. The design uses an anisotropically etched silicon diaphragm, electrostatically bonded to a borosilicate glass insert, mounted in a titanium body.

Paper Details

Date Published: 1 September 2000
PDF: 7 pages
Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397920
Show Author Affiliations
John Greenwood, Druck Ltd. (United Kingdom)
George M. Dobre, Univ. of Kent at Canterbury (United Kingdom)

Published in SPIE Proceedings Vol. 4075:
Micro-Opto-Electro-Mechanical Systems
Richard R. A. Syms, Editor(s)

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