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Proceedings Paper

Scanning silicon micromirror using a bidirectionally movable magnetic microactuator
Author(s): Hyoung J. Cho; Jun Yan; Stephen T. Kowel; Fred Richard Beyette; Chong Hyuk Ahn
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Paper Abstract

In this work, a scanning silicon micromirror using a bi- directionally movable magnetic microactuator is designed, fabricated and characterized. Although there have been technical difficulties in realizing bi-directional motion in magnetic MOEMS devices for the lack of a suitable structuring technique for permanent magnet components, we overcome those by using UV-LIGA process of thick CONiMnP alloy films and arrays. Based on this new fabrication technique, hard magnetic films or arrays are directly electroplated on silicon cantilever beams in order to compose moving mirror parts. A micromirror is constructed by combining the beam with an electromagnet. According to the change of current in electromagnets, the micromirrors are deflected either upward or downward depending on the direction of magnetic field generated by the electromagnets. Optical properties of the scanning mirrors are measured by a He-Ne laser beam source with the wavelength of 632.8 nm and an optical power detector. A prototype scanning micromirror shows +/- 60 micrometers deflections at the current of +/- 100 mA. The Gaussian profile of the laser beam is well preserved. The reflectance is above 98 percent for the mirrors coated with aluminum films.

Paper Details

Date Published: 22 August 2000
PDF: 10 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396520
Show Author Affiliations
Hyoung J. Cho, Univ. of Cincinnati (United States)
Jun Yan, Univ. of Cincinnati (United States)
Stephen T. Kowel, Univ. of Cincinnati (United States)
Fred Richard Beyette, Univ. of Cincinnati (United States)
Chong Hyuk Ahn, Univ. of Cincinnati (United States)


Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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