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Proceedings Paper

Optical 2x2 switch matrix with electromechanical micromotors
Author(s): Antonio Ruzzu; Dirk Haller; Juergen Mohr; Ulrike Wallrabe
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Paper Abstract

In the rapidly developing optical telecommunication domain optical switch arrays lend themselves to the complex switching tasks. Therefore a prototype of an all-optical switch matrix with 2 in- and output channels has been developed in LIGA-technique. However, with the presented concept also switch arrays with more channels can be realized. The switch array has been designed for the telecommunication wavelength 1.55 micrometers and for single mode application. The optical signals are detoured inside a microoptical bench by means of moveable micromirrors. For the collimation of the light beams spherical glass lense are used. Fibers and lenses are passively aligned with mounts and stops in the LIGA-structured microoptical bench. The mirrors are placed by electrostatic wobble motors. Defined end positions for the micromirrors are realized by use of electromechanical dead stops. In order to avoid angular displacements of the deflected light beams double mirrors are used. The presented prototype features two 2 by 2 switch matrices on a 10 by 10 mm2 ceramic substrate with six micromotors with 1.7 mm diameter. Switching times down to 30 ms have been achieved. The crosstalk between different channels is 90 dB and first measurements of the insertion loss with passive alignment of the optical elements yielded 7 dB. Further work to reduce the insertion loss by optimization of the alignment features are under way.

Paper Details

Date Published: 22 August 2000
PDF: 10 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396516
Show Author Affiliations
Antonio Ruzzu, Forschungszentrum Karlsruhe GmbH (Germany)
Dirk Haller, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Ulrike Wallrabe, Forschungszentrum Karlsruhe GmbH (Germany)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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