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Proceedings Paper

MOEMS pressure sensors for propulsion applications
Author(s): Joseph T. Boyd; Samhita Dasgupta; Howard E. Jackson
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Paper Abstract

Pressure sensors utilizing MEMS technology for fabrication of the sensing element, interrogation by fiber optics, and which are suitable for propulsion applications are described. Devices utilizing micro-opto-electro-mechanical systems (MOEMS) technology are often better suited for harsh environments than electrically interrogated MEMS devices, so with sturdy packaging these optical devices may be useful to many propulsion applications. MOEMS pressure sensors can also be incorporated into arrays for detailed spatial characterization along with inherent high speed temporal characterization. Such characterization is expected to be very useful for propulsion systems. This presentation will first review optical-MEMS pressure sensor configurations. We will then concentrate on configurations most suitable for high speed applications in harsh environments. Examples of experimental results for static pressure test as well as for dynamic pressure test carried out in a shock tube demonstrating good linearity, sensitivity and time response will then be presented. Hybrid and monolithic array configurations will be presented. A discussion of the use of wavelength division multiplexing for efficient accessing of array elements will also be included.

Paper Details

Date Published: 22 August 2000
PDF: 7 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396511
Show Author Affiliations
Joseph T. Boyd, Univ. of Cincinnati (United States)
Samhita Dasgupta, Univ. of Cincinnati (USA) and Taitech, Inc. (United States)
Howard E. Jackson, Univ. of Cincinnati (United States)


Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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