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Proceedings Paper

Test system for micromirror arrays
Author(s): Peter Duerr; Thomas Tanneberger; Alexander Wolter; Wolfram Kluge; Wolfgang Doleschal; Hubert K. Lakner
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Paper Abstract

Over the last few years, high resolution spatial light modulators (SLMs) have been developed at the IMS Dresden. These are fabricated using one of two different technological processes. In one version a flexible, highly reflecting aluminum coating of about 50nm is evaporated onto a elastic layer, while the other version has quite rigid aluminum mirrors that are suspended by flexible hinges above the substrate. Both versions are fabricated on top of a CMOS DRAM matrix, which allows the addressing of individual pixels. So far SLMs with over 2 million pixels have been produced. In order to ensure a high quality of these SLMs a map of the SLM under test is needed showing the exact position of defective pixels together with the type of defect e.g. not responding, always deflected, wrong spring constant, poorly reflecting surface. Additionally information on the local and global flatness is required. This task can only be handled by an automated test stitching together many single measurements. A test system has bene set up using a white light interferometer. This allows to measure the response of each and every SLM pixel to applied voltages.

Paper Details

Date Published: 22 August 2000
PDF: 7 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396507
Show Author Affiliations
Peter Duerr, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Thomas Tanneberger, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Alexander Wolter, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Wolfram Kluge, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Wolfgang Doleschal, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)
Hubert K. Lakner, Fraunhofer Institute for Microelectronic Circuits and Systems (Germany)


Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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