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Proceedings Paper

Micromirrors and micromirror arrays for scanning applications
Author(s): Thomas Gessner; Steffen Kurth; Christian Kaufmann; Joachim Markert; Andreas Ehrlich; Wolfram Doetzel
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Paper Abstract

The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.

Paper Details

Date Published: 22 August 2000
PDF: 10 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396505
Show Author Affiliations
Thomas Gessner, Chemnitz Univ. of Technology (Germany)
Steffen Kurth, Chemnitz Univ. of Technology (Germany)
Christian Kaufmann, Chemnitz Univ. of Technology (Germany)
Joachim Markert, Chemnitz Univ. of Technology (Germany)
Andreas Ehrlich, Erwin Sick Engineering GmbH (Germany)
Wolfram Doetzel, Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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