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Proceedings Paper

MEMS actuators for silicon micro-optical elements
Author(s): Norman C. Tien; David T. McCormick
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Paper Abstract

Micro actuators are critical elements in all micro-systems which require components that are not stationary. Numerous technologies have been developed in the field of MEMS to provide actuation. These devices are both surface and bulk micromachined and employ a variety of methods including electrostatics, thermal expansion and magnetism to generate forces and displacements. With the rapid growth of micro-optical system applications new actuators are required with unique characteristics. In this paper a review of common actuation technologies is presented. In addition two actuation methods, asymmetric combdrives and electrothermal vibromotors, which are well suited for optical systems are presented. Finally, the importance of control in micro-optical systems is discussed.

Paper Details

Date Published: 22 August 2000
PDF: 14 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396497
Show Author Affiliations
Norman C. Tien, Cornell Univ. (United States)
David T. McCormick, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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