Share Email Print

Proceedings Paper

MEMS/MEOMS: metrology and machine vision
Author(s): Rick Conner
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

MEMS/MOEMS devices are ubiquitous and span a diverse set of markets and technology circles. Typically these devices are inserted into the final product with only a minimal amount of precision inspection. It is imperative that micro inspection and other micro packaging techniques are implemented at the front end of the manufacturing process to avoid costly yield problems. Metrology and Machine Vision can increase yields, reduce throughputs, and reduce downtime by minimizing reliance on human vision and manual dexterity. In this work we begin to define a systems view of the different types of MEMS/MOEMS devices and associated micro packaging and inspection techniques and issues.

Paper Details

Date Published: 22 August 2000
PDF: 14 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396495
Show Author Affiliations
Rick Conner, Newport Corp. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

© SPIE. Terms of Use
Back to Top