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Proceedings Paper

MEMS feedback control using through-wafer optical device monitoring
Author(s): Jeremy M. Dawson; Limin Wang; Jingdong Chen; Parviz F. Famouri; Lawrence Anthony Hornak
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Paper Abstract

As microelectromechanical systems (MEMS) become widely implemented, the application of closed-loop control methods to MEMS will lead to higher degrees of certainty and reliability of microelectromechanical operation in physically demanding environments. By including planar diffractive optics in these systems, an optical method of determining MEMS microstructure position that is fully decoupled from the means of mechanical actuation can be realized. This paper presents the result of initial research evaluating both open and closed-loop nonlinear proportional-integral-differential (PID) control routines using a 1.3 micrometers wavelength through-wafer free-space optical probe to obtain a position signal from a lateral comb resonator fabricated using Chronos Integrated Microsystems' Multi-User MEMS Process service. The implementation of sliding control methods is illustrated through simulation results, and the design considerations for a proposed integrated optical monitoring architecture is presented.

Paper Details

Date Published: 22 August 2000
PDF: 11 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396494
Show Author Affiliations
Jeremy M. Dawson, West Virginia Univ. (United States)
Limin Wang, West Virginia Univ. (United States)
Jingdong Chen, West Virginia Univ. (United States)
Parviz F. Famouri, West Virginia Univ. (United States)
Lawrence Anthony Hornak, West Virginia Univ. (United States)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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