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Proceedings Paper

Thermally actuated microprojector for optical display applications
Author(s): Sandra Schweizer; Peter Cousseau; Sebastien Schiesser; Gerhard Lammel; Sam Calmes; Philippe Renaud
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Paper Abstract

A dual-axis, raster-scanning laser display based on a monolithic micromachined scanning mirror is presented. The scanner consists of a micromirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that an 'L'-shape cantilever, which is simultaneously excited at non-resonance and at resonance, gives the two orthogonal angular motions. The high sensitivity of the thermal bimorph actuator allows a low frequency movement of the scanner in one direction. The second orthogonal scanning direction is a resonance torsion motion. The micro-device has a raster scanning frequency varying from 1000 Hz to 5000 Hz depending on the geometry, and if combined with a 50 Hz frame signal, has a definition of up to 100 lines. Mechanical scan amplitudes over 15 degrees in two orthogonal directions have been achieved. The typical power consumption is 5 mW. In this paper, the resolution of the scanner is discussed which is limited by the diffraction from the 500 micrometers to 300 micrometers mirror and its flatness. The performance of the new device is demonstrated by projecting a 2D image using a modulated laser diode and the two orthogonal mirror deflections.

Paper Details

Date Published: 22 August 2000
PDF: 11 pages
Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396485
Show Author Affiliations
Sandra Schweizer, Swiss Federal Institute of Technology Lausanne (United States)
Peter Cousseau, Debiotech SA (Switzerland)
Sebastien Schiesser, Swiss Federal Institute of Technology Lausanne (Switzerland)
Gerhard Lammel, Swiss Federal Institute of Technology Lausanne (Germany)
Sam Calmes, Xros Inc. (United States)
Philippe Renaud, Swiss Federal Institute of Technology Lausanne (Canada)

Published in SPIE Proceedings Vol. 4178:
MOEMS and Miniaturized Systems
M. Edward Motamedi; Rolf Goering, Editor(s)

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