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Proceedings Paper

Design and fabrication of a micromechanical inverter
Author(s): Kyoung-Soo Chae; Seungoh Han; Minseok Song; Sung W. Moon; James Jungho Pak
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Paper Abstract

A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 micrometers -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23V.

Paper Details

Date Published: 25 August 2000
PDF: 7 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396471
Show Author Affiliations
Kyoung-Soo Chae, Korea Univ. and Korea Institute of Science and Technology (South Korea)
Seungoh Han, Korea Univ. (South Korea)
Minseok Song, Korea Univ. (South Korea)
Sung W. Moon, Korea Institute of Science and Technology (South Korea)
James Jungho Pak, Korea Univ. (South Korea)

Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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