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Proceedings Paper

Powder blasting as a three-dimensional microstucturing technology for MEMS applications
Author(s): Eric Belloy; I. Zalunardo; Abdeljlail Sayah; Martin A. M. Gijs
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Paper Abstract

We present powder blasting as a new technology for the realization of Micro Electro-Mechanical Systems (MEMS). The technique is base don the erosion of a masked substrate by a high velocity powder beam. We study the erosion rate of the process using glass wafers and introduce oblique powder blasting, where we vary the angle of incidence of the powder beam with respect tot the target surface. The oblique impact gives rise to particular side walls effects of micro patterned hole structures. We have applied this microfabrication method for various MEMS applications, like the realization of glass accelerometer beams, biological microsystems for the culture and characterization of living cells and ferrite-based miniaturized transformers for ultra- small power applications.

Paper Details

Date Published: 25 August 2000
PDF: 10 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396467
Show Author Affiliations
Eric Belloy, Swiss Federal Institute of Technology Lausanne (Switzerland)
I. Zalunardo, Swiss Federal Institute of Technology Lausanne (Switzerland)
Abdeljlail Sayah, Swiss Federal Institute of Technology Lausanne (Switzerland)
Martin A. M. Gijs, Swiss Federal Institute of Technology Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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