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Proceedings Paper

Dynamic actuation behavior of NiTi/Si diaphragm micropump
Author(s): Dong Xu; Li Wang; Guifu Ding; Yong Zhou; Aibin Yu; Xiulan Cheng; Jian Chen; Bingchu Cai
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Paper Abstract

A novel micropump actuated by NiTi/Si diaphragm has been developed. In order to optimize the actuating performance of the micropump, the dynamic actuating properties were studied in different actuating conditions such as different actuating currents, frequencies and duty cycles. The experimental result show that there is a maximum displacement when increasing the actuating current and frequency. The influence of duty cycle on maximum displacement when increasing the actuating current and frequency. The influence of duty cycle on maximum displacement with water flow and without water flow is different. The higher the displacement of the diaphragm is, the larger the flow rate is for a given frequency. The displacement of the pump diaphragm depends not only on the flow rate, but also on the moving frequency. The change of the resistance of NiTi strip indicates that the A - M phase transformation is completed partly during dynamic actuating processes. The maximum flow rate of 360 (mu) l/min was obtained in about 50Hz with 1:1 duty cycle in our experiment.

Paper Details

Date Published: 25 August 2000
PDF: 7 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396449
Show Author Affiliations
Dong Xu, Shanghai Jiao Tong Univ. (China)
Li Wang, Shanghai Jiao Tong Univ. (China)
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Yong Zhou, Shanghai Jiao Tong Univ. (China)
Aibin Yu, Shanghai Jiao Tong Univ. (China)
Xiulan Cheng, Shanghai Jiao Tong Univ. (China)
Jian Chen, Shanghai Jiao Tong Univ. (Singapore)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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