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Proceedings Paper

Process development and fabrication of application-specific microvalves
Author(s): Bai Xu; James Castracane; Robert E. Geer; Yahong Yao; Bruce Altemus
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Paper Abstract

MEMS promise to revolutionize nearly every product category by bringing together silicon-based microelectronics fabrication with silicon micromachining technology, thereby, making possible the realizing of complete systems-on-a-chip.

Paper Details

Date Published: 25 August 2000
PDF: 8 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396446
Show Author Affiliations
Bai Xu, SUNY/Albany (United States)
James Castracane, SUNY/Albany (United States)
Robert E. Geer, SUNY/Albany (United States)
Yahong Yao, SUNY/Albany (United States)
Bruce Altemus, SUNY/Albany (United States)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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