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Proceedings Paper

Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation
Author(s): Andreas Ostendorf; Klaus Koerber; Thorsten Temme; Bob Bann; Paul Apte; Heinz Haberzettl; Tatjana Budischewski
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Paper Abstract

In this paper, a technology and a machine tool is presented, which can be implemented in the production of Liquid Crystal Displays (LCDs), leading to a higher flexibility and reduced manufacturing costs. The developed technology focuses on the generation of transfer points by selective removal of polyimide on an Indium Tin Oxide layer with UV-laser radiation, thus replacing the conventional stamping method with cliches. With the combination of xy-stages and galvanometer scanner beam deflection, panels with dimensions of up to 400 by 500 mm2 can be processed. On test panels, the required 2000 transfer points, distribute on the entire panel, can be processed in step and scan mode in about 30 s with an accuracy of better than 20 micrometers . The yield of the new technology in terms of working displays is comparable to the current technology. Besides LCD production, the developed machine tool has a high potential in the field of micro and precision engineering on large scale panels. The machine is highly versatile and can be used to perform a wide variety of processes in organic and inorganic materials for volume production as well as for research.

Paper Details

Date Published: 25 August 2000
PDF: 11 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396441
Show Author Affiliations
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Klaus Koerber, Laser Zentrum Hannover e.V. (Germany)
Thorsten Temme, Laser Zentrum Hannover e.V. (Germany)
Bob Bann, Exitech Ltd. (United Kingdom)
Paul Apte, Exitech Ltd. (United Kingdom)
Heinz Haberzettl, Optrex Europe GmbH (Germany)
Tatjana Budischewski, Optrex Europe GmbH (Germany)

Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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