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Proceedings Paper

General MEMS process physics simulation and its applications
Author(s): Nora Finch; Yie He; James Marchetti
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Paper Abstract

Commercial CAD tools for MEMS have significantly contributed to the growth that the MEMS industry has experienced over the past two years by reducing development cycles and enabling the more rapid release of mature MEMS products. Unfortunately, the CAD for MEMS industry has focused primarily on device performance with a concentration on testing and optimizing the performance in a workstation environment. Device manufacturability issues have been neglected and considered secondary design criteria.

Paper Details

Date Published: 25 August 2000
PDF: 5 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396437
Show Author Affiliations
Nora Finch, IntelliSense Corp. (United States)
Yie He, IntelliSense Corp. (United States)
James Marchetti, IntelliSense Corp. (United States)

Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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