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Proceedings Paper

Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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Paper Details

Date Published: 25 August 2000
PDF: 12 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396435
Show Author Affiliations
Laurent Dellmann, Univ. of Neuchatel (Switzerland)
Terunobu Akiyama, Univ. of Neuchatel (Switzerland)
Danick Briand, Univ. of Neuchatel (Switzerland)
Sebastien Gautsch, Univ. of Neuchatel (Switzerland)
Olivier T. Guenat, Univ. of Neuchatel (Switzerland)
Benedikt Guldimann, Univ. of Neuchatel (Switzerland)
Philippe Luginbuhl, Univ. of Neuchatel (Switzerland)
Cornel Marxer, Univ. of Neuchatel (Liechtenstein)
Urs Staufer, Univ. of Neuchatel (Switzerland)
Bart van der Schoot, Univ. of Neuchatel (Switzerland)
Nico F. de Rooij, Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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