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Proceedings Paper

Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Paper Details

Date Published: 25 August 2000
PDF: 10 pages
Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396434
Show Author Affiliations
Masayoshi Esashi, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 4174:
Micromachining and Microfabrication Process Technology VI
Jean Michel Karam; John A. Yasaitis, Editor(s)

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