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Proceedings Paper

Microstructuring with 193-nm laser radiation
Author(s): Lin Zhang; Qihong Lou; Yunrong Wei; Feng Huang
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Paper Abstract

For flexible structuring of a great variety of materials such as polymers ceramics and glass materials, excimer laser radiation has turned out to be a particularly appropriate tool. The excimer laser etching enables the manufacturing of micro-holes and grooves in the micrometer range, as well as the production of complex 3D topographies. In this paper, the surface characteristics of polymer and glass are compared after been etched by 308nm and 197nm UV excimer lasers, the results show that the use of ArF laser allows processing a surface quality close to that of the optics and fabricating ridges about 2micrometers - width. Finally, a rotational mask system is proposed to generate Fresnel lens.

Paper Details

Date Published: 18 August 2000
PDF: 6 pages
Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); doi: 10.1117/12.395735
Show Author Affiliations
Lin Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Yunrong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Feng Huang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4181:
Challenges in Process Integration and Device Technology
David Burnett; Shin'ichiro Kimura; Bhanwar Singh, Editor(s)

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