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Proceedings Paper

Thickness-dependent optical and dielectric behaviors of low-k polymer thin films
Author(s): Hyungkun Kim; Frank G. Shi; Bin Zhao; Maureen R. Brongo
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Paper Abstract

A study of both thickness dependent optical and dielectric properties of a low-dielectric constant polycrystalline polymer thin film is investigated. It is demonstrated that the refractive index increase with increasing film thickness, but for thickness < 200 nm, abnormal decrease of the refractive index with increasing film thickness is observed. It is also found that the dielectric strength has a strong dependance on film thickness, which decrease with increasing film thickness. Optical spectroscopy and current ramping voltage test are involved to investigate thickness dependence of optical and dielectric properties. The observations are discussed in terms of our and other models for film thickness dependent of dielectric strength as well as refractive index.

Paper Details

Date Published: 18 August 2000
PDF: 7 pages
Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); doi: 10.1117/12.395718
Show Author Affiliations
Hyungkun Kim, Univ. of California/Irvine (United States)
Frank G. Shi, Univ. of California/Irvine (United States)
Bin Zhao, Conexant Systems Inc. (United States)
Maureen R. Brongo, Conexant Systems Inc. (United States)

Published in SPIE Proceedings Vol. 4181:
Challenges in Process Integration and Device Technology
David Burnett; Shin'ichiro Kimura; Bhanwar Singh, Editor(s)

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