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Proceedings Paper

Evolution of semiconductor process technology
Author(s): Trung Tri Doan
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Paper Abstract

For the past years the number of transistors integrated into a single chip has doubled every one to two years; that trend has not slowed down. Actually, it has accelerated every time we hit a technology barrier point. New developments in process and equipment technology have enabled us to follow Moore's law to reduce the average dimension of the physical features of integrated circuits from 10micrometers down to .1micrometers . What will be the limit be. 0.01micrometers and 120 inches. We will not reach it within this decade.

Paper Details

Date Published: 18 August 2000
PDF: 4 pages
Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); doi: 10.1117/12.395712
Show Author Affiliations
Trung Tri Doan, Micron Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 4181:
Challenges in Process Integration and Device Technology
David Burnett; Shin'ichiro Kimura; Bhanwar Singh, Editor(s)

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