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Proceedings Paper

Ultrasonic actuation for MEMS dormancy-related stiction reduction
Author(s): Ville Kaajakari; Shyi-Herng Kan; Li-Jen Lin; Amit Lal; M. Steven Rodgers
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Paper Abstract

The use of ultrasonic pulses incident on surface micromachines has been shown to reduce dormancy-related failure. We applied ultrasonic pulses from the backside of a silicon substrate carrying SUMMiT processed surface micromachined rotors, used earlier as ultrasonic motors. The amplitude of the pulses was less than what is required to actuate the rotor (sub-threshold actuation). By controlling the ultrasonic pulse exposure time it was found that pulsed samples had smaller actuation voltages as compared to non-pulsed samples after twelve-hour dormancy. This result indicates that the micromachine stiction to surfaces during dormant period can be effectively eliminated, resulting in long-term stability of surface micromachines in critical applications.

Paper Details

Date Published: 10 August 2000
PDF: 6 pages
Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); doi: 10.1117/12.395709
Show Author Affiliations
Ville Kaajakari, Univ. of Wisconsin/Madison (United States)
Shyi-Herng Kan, Univ. of Wisconsin/Madison (United States)
Li-Jen Lin, Univ. of Wisconsin/Madison (United States)
Amit Lal, Univ. of Wisconsin/Madison (United States)
M. Steven Rodgers, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4180:
MEMS Reliability for Critical Applications
Russell A. Lawton, Editor(s)

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