Share Email Print

Proceedings Paper

Ultrasonic actuation for MEMS dormancy-related stiction reduction
Author(s): Ville Kaajakari; Shyi-Herng Kan; Li-Jen Lin; Amit Lal; M. Steven Rodgers
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The use of ultrasonic pulses incident on surface micromachines has been shown to reduce dormancy-related failure. We applied ultrasonic pulses from the backside of a silicon substrate carrying SUMMiT processed surface micromachined rotors, used earlier as ultrasonic motors. The amplitude of the pulses was less than what is required to actuate the rotor (sub-threshold actuation). By controlling the ultrasonic pulse exposure time it was found that pulsed samples had smaller actuation voltages as compared to non-pulsed samples after twelve-hour dormancy. This result indicates that the micromachine stiction to surfaces during dormant period can be effectively eliminated, resulting in long-term stability of surface micromachines in critical applications.

Paper Details

Date Published: 10 August 2000
PDF: 6 pages
Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); doi: 10.1117/12.395709
Show Author Affiliations
Ville Kaajakari, Univ. of Wisconsin/Madison (United States)
Shyi-Herng Kan, Univ. of Wisconsin/Madison (United States)
Li-Jen Lin, Univ. of Wisconsin/Madison (United States)
Amit Lal, Univ. of Wisconsin/Madison (United States)
M. Steven Rodgers, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 4180:
MEMS Reliability for Critical Applications
Russell A. Lawton, Editor(s)

© SPIE. Terms of Use
Back to Top