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Proceedings Paper

Approach to higher reliability in 3D micromechanisms
Author(s): Narito Shibaike; Hiroyuki Takeuchi; Kunihiko Nakamura; Norisato Shimizu
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Paper Abstract

A micro-reducer characterized in its small size, high resolution ration and high reliability has been developed to achieve sufficient performance after 5,000,000 high-speed rotations1. A 3K-type mechanical paradox planetary gear reduction system was chosen in mechanical design. The size of a reducing part is 3 x 3.8 x 1.3 mm, and its reduction ratio is about 200. The module of the fine gears is 0.03. Alloy tool steel and WC-Ni-Cr super hard alloy were selected for the materials. The mechanical, thermal and environmental attributes were investigated by the properties of the materials suitable for micro fabrication on the specific strength and resistance to thermal distortion as the functional performance, and energy content of the material as the environmental impact. Micro-EDM process was optimized to accurately shape such a microscopic components. Surface modification by DLC, CrN, and MoS+-2) thin film was applied by rotating deposition technique to improve the surface-based attributes such as hardness, friction coefficient and resistance to wear. Several kinds of lubrication and bearing systems were evaluated to understand their internal energy dissipation and durability. This report presents such a synthetic approach for the micro-reducer to be steady, efficient and durable.

Paper Details

Date Published: 18 August 2000
PDF: 10 pages
Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); doi: 10.1117/12.395688
Show Author Affiliations
Narito Shibaike, Matsushita Electric Industrial Co., Ltd. (Japan)
Hiroyuki Takeuchi, Matsushita Electric Industrial Co., Ltd. (Japan)
Kunihiko Nakamura, Matsushita Electric Industrial Co., Ltd. (Japan)
Norisato Shimizu, Matsushita Electric Industrial Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4179:
Micromachining Technology for Micro-Optics
Sing H. Lee; Eric G. Johnson, Editor(s)

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