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Proceedings Paper

Fabrication of micro-optical components by high-precision embossing
Author(s): Thomas Otto; Andreas Schubert; Juliana Boehm; Thomas Gessner
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Paper Abstract

Optical components, such as miniature spectrometer gratings working in the infrared range for environmental monitoring or physical analytics, contribute appeciably to the price of Micro Electro Opto Mechanical Systems (MOEMS). These optical components could be a part of a miniature functional package produced with an alternative fabrication technology based on cold forming metals. The cost-efficient fabrication of these components, for example by implementation of forming technology, appears promising. With this technology, high quality embossing of optical structures for high precision requirements in a batch process is possible. In this way the system costs can be reduced. In this paper aluminum forming by cold embossed grating for the fabrication of gratings was investigated. Experiments with different geometries of the embossed grating were carried out. The quality of the embossed structures is primarily determined by the precision and surface quality of the die. Therefore we used a single crystalline silicon tool made by etching as a die. Quality criteria for the review of the formed optical grating were the geometry of surfaces and the surface roughness as well as optical properties of the total structure.

Paper Details

Date Published: 18 August 2000
PDF: 11 pages
Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); doi: 10.1117/12.395679
Show Author Affiliations
Thomas Otto, Fraunhofer Institute for Reliability and Microintegration (Germany)
Andreas Schubert, Fraunhofer Institute for Machine Tools and Forming Technology (Germany)
Juliana Boehm, Fraunhofer Institute for Machine Tools and Forming Technology (Germany)
Thomas Gessner, Fraunhofer Institute for Reliability and Microintegration and Chemnitz Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 4179:
Micromachining Technology for Micro-Optics
Sing H. Lee; Eric G. Johnson, Editor(s)

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